Sputtering mode diagram for the precise growth of NbN superconductor films

The sputtering mode diagram (SMD) provides a powerful tool for comprehensive structure engineering of functional films in developing advanced electronic devices, but has not reported due to the complexity of dynamic process and multi-parameters. Here, we report the SMD of superconductor niobium nitr...

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Autors principals:	Mengfan Zhang, Qi Chen, Hao Wang, Liang Ma, Xin Xu, Zhuolin Yang, Yanqiu Guan, Huipeng Xia, Xiaoqing Jia, Lin Kang, Labao Zhang, Peiheng Wu
Format:	Artigo
Idioma:	Inglês
Publicat:	Tsinghua University Press 2024-06-01
Col·lecció:	Nano Research
Matèries:	reactive magnetron sputtering superconductor film niobium nitride superconducting nanowire single-photon detector quantum devices
Accés en línia:	https://www.sciopen.com/article/10.26599/NR.2025.94907490
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