The effect of anode temperature on the Optical characteristic of Se films prepared by direct current planar magnetron sputtering
This work describes, selenium (Se) films were deposited on clean glass substrates by dc planar magnetron sputtering technique.The dependence of sputtering deposition rate of Se film deposited on pressure and DC power has been studied. The optimum argon pressure has range (4x10-1 -8x10-2 )mbar. The...
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
University of Baghdad
2010-12-01
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| Schriftenreihe: | Iraqi Journal of Physics |
| Schlagworte: | |
| Online-Zugang: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/826 |
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