An Inkjet Printing Technique for Scalable Microfabrication of Graphene-Based Sensor Components

This paper presents a versatile and precise graphene patterning technique using the combined process of masking and inkjet printing. A graphene-based structure is fabricated by first defining the structural pattern and position using a masking mold, which can be either electroplated copper or deep r...

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主要な著者:	Yu-Min Fu, Meng-Chuin Chou, Che-Hao Kang, Yu-Ting Cheng, Pu-Wei Wu, Guan-Yu Chen, Ethan B. Secor, Mark C. Hersam
フォーマット:	Artigo
言語:	Inglês
出版事項:	IEEE 2020-01-01
シリーズ:	IEEE Access
主題:	Microelectromechanical systems inkjet printing microstructure tactile sensors
オンライン･アクセス:	https://ieeexplore.ieee.org/document/9078740/
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