Design, Simulation, and Parametric Analysis of an Ultra-High Purity Phosphine Purification Process with Dynamic Control
Phosphine (PH<sub>3</sub>) is an important functional material that plays a pivotal role in semiconductor fields. As semiconductor technology rapidly advances toward smaller sizes and higher performance, the requirements for the purity of phosphine in chip manufacturing are becoming increasingly str...
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| Главные авторы: | , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2025-11-01
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| Серии: | Separations |
| Предметы: | |
| Online-ссылка: | https://www.mdpi.com/2297-8739/12/11/309 |
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