Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase

A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal...

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Detalhes bibliográficos

Principais autores:	Chenjia Gao, Zhan Gao, Yuhao Niu, Xu Wang, Jieming Zhao, Lin Deng
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2021-06-01
Colecção:	Applied Sciences
Assuntos:	micro vibration real-time full-field microscopic speckle interferometry orthogonal phase
Acesso em linha:	https://www.mdpi.com/2076-3417/11/11/5251
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