The effect of S/Mo ratio on structure and properties of MoSx-Ti composite coatings deposited by magnetron sputtering
MoS _x -Ti composite coatings with different S/Mo ratios were prepared by varying the substrate bias voltage of magnetron sputtering. It was found that the S/Mo ratio of the as-deposited MoS _x -Ti coating decreased gradually from 1.7 to 1.3 as substrate bias voltage increased from −30 V to −110 V....
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| Автори: | , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
IOP Publishing
2020-01-01
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| Серія: | Materials Research Express |
| Предмети: | |
| Онлайн доступ: | https://doi.org/10.1088/2053-1591/abbd5f |
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