Dual-function pressure-temperature sensor based on silicon whiskers
The article presents the design of a pressure-temperature sensor based on p-type silicon whiskers, doped with boron, with a resistivity of 0,005 Ohm?cm. The sensor is operable in a temperature range from –100 to +200°C and at pressures from 0 to 20 MPa. The sensor is designed for a wide range of app...
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| Autores principales: | , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Politehperiodika
2013-06-01
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| Colección: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Materias: | |
| Acceso en línea: | http://www.tkea.com.ua/tkea/2013/4_2013/pdf/05.zip |
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