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FEM-Based Design and Characterization of a Millimeter-Scale Piezoelectric Resonance Force Sensor

This paper presents a millimeter-scale piezoelectric effect-based force sensor that uses the change in its resonant frequency as the detection principle for high sensitivity and a wide measurement range. Such characteristics are suited for robot hand applications that not only detect small forces bu...

Ausführliche Beschreibung

Gespeichert in:
Hauptverfasser: Aoto Yamazaki, Takuma Akiduki, Atsuo Honna, Michiteru Kitazaki, Tomoaki Mashimo
Format: Artigo
Sprache:Inglês
Veröffentlicht: IEEE 2026-01-01
Schriftenreihe:IEEE Access
Schlagworte:
Force sensors
piezoelectric effect
resonators
transducers
ultrasonics
Online-Zugang:https://ieeexplore.ieee.org/document/11367624/
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