Deep Learning for Rapid Analysis of Spectroscopic Ellipsometry Data

High‐throughput experimental approaches to rapidly develop new materials require high‐throughput data analysis methods to match. Spectroscopic ellipsometry is a powerful method of optical properties characterization, but for unknown materials and/or layer structures the data analysis using tradition...

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Bibliografiske detaljer

Principais autores:	Yifei Li, Yifeng Wu, Heshan Yu, Ichiro Takeuchi, Rafael Jaramillo
Format:	Artigo
Sprog:	Inglês
Udgivet:	Wiley-VCH 2021-12-01
Serier:	Advanced Photonics Research
Fag:	deep learning high-throughput phase-change materials spectroscopic ellipsometry
Online adgang:	https://doi.org/10.1002/adpr.202100147
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