FEM-Analysis of 2D Micromachined Flow Transduers based on aGe-Thermistor Arrays and a Double Bridge Readout

This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess...

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Principais autores:	Almir Talic, Samir Cerimovic, Roman Beigelbeck, Franz Kohl, Thilo Sauter, Franz Keplinger
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2019-08-01
coleção:	Sensors
Assuntos:	micro-electro-mechanical systems (MEMS) wind sensor finite element method (FEM) Wheatstone bridge configuration
Acesso em linha:	https://www.mdpi.com/1424-8220/19/16/3561
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