Superhard oxidation-resistant Ti1-xAlxBy thin films grown by hybrid HiPIMS/DCMS co-sputtering diboride targets without external substrate heating

Ti1-xAlxBy films (0.40 ≤ x ≤ 0.76, and 1.81 ≤ y ≤ 2.03) combining good mechanical properties and high-temperature oxidation resistance are demonstrated. Layers are grown using a hybrid high-power impulse and dc magnetron co-sputtering employing two target configurations (AlB2-HiPIMS/TiB2-DCMS and Ti...

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Hlavní autoři:	B. Wicher, O.V. Pshyk, X. Li, B. Bakhit, V. Rogoz, I. Petrov, L. Hultman, G. Greczynski
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	Elsevier 2024-02-01
Edice:	Materials & Design
Témata:	Transition metal diboride thin films Mechanical properties Oxidation resistance Magnetron sputtering HiPIMS Ion mass spectrometry
On-line přístup:	http://www.sciencedirect.com/science/article/pii/S0264127524000996
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