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A Microtester for Measuring the Reliability of Microdevices in Controlled Environmental Conditions

A miniaturized reliability test system for microdevices with controlled environmental parameters is presented. The system is capable of measuring key electrical parameters of the microdevices while controlling the environmental conditions around the microdevices. The test system is compact and thus...

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Bibliografische gegevens
Hoofdauteurs: Yunjia Li, Weitao Dou, Chenyuan Zhou, Xinyi Wang, Aijun Yang, Yong Zhang, Dayong Qiao
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI AG 2021-05-01
Reeks:Micromachines
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Online toegang:https://www.mdpi.com/2072-666X/12/5/585
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