Integrated CuO/Pd Nanospike Hydrogen Sensor on Silicon Substrate

A large area of randomly distributed nanospike as nanostructured template was induced by femtosecond (fs) laser on a silicon substrate in water. Copper oxide (CuO) and palladium (Pd) heterostructured nanofilm were coated on the nanospikes by magnetron sputtering technology and vacuum thermal evapora...

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主要な著者:	Ru Lin, Qi Hu, Zuolian Liu, Shusheng Pan, Zhifeng Chen, Wei Zhang, Zhiyu Liu, Shaolin Zhang, Chengyun Zhang
フォーマット:	Artigo
言語:	Inglês
出版事項:	MDPI AG 2022-05-01
シリーズ:	Nanomaterials
主題:	femtosecond laser hydrogen sensor CuO Pd Si nanospike green process
オンライン･アクセス:	https://www.mdpi.com/2079-4991/12/9/1533
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