A TCAD study on the effect of process parameters on silicon optical phase shifter performance
On-chip integrated optical phase shifters are an important part of optical phase modulators. The performance of such modulators relies heavily on the phase shifter performance, which in turn depends on multiple process parameters. This paper reports the study of the effect of different process param...
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| Autori principali: | , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Frontiers Media S.A.
2023-04-01
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| Serie: | Frontiers in Physics |
| Soggetti: | |
| Accesso online: | https://www.frontiersin.org/articles/10.3389/fphy.2023.1123885/full |
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