Enhanced Robustness of a Bridge-Type Rf-Mems Switch for Enabling Applications in 5G and 6G Communications

In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or three anchoring points, are designed and optimized to minimize membrane deformation due to residual fabrication stresses, thus exhibiting...

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מידע ביבליוגרפי

Principais autores:	Jasmina Casals-Terré, Lluís Pradell, Julio César Heredia, Flavio Giacomozzi, Jacopo Iannacci, Adrián Contreras, Miquel Ribó
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	MDPI AG 2022-11-01
סדרה:	Sensors
נושאים:	RF-MEMS switch beam suspension coplanar-waveguide
גישה מקוונת:	https://www.mdpi.com/1424-8220/22/22/8893
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