Wear properties of HFCVD diamond films on SiC substrate
Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and R...
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| Główni autorzy: | , , , , , , |
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| Format: | Artigo |
| Język: | Chinês |
| Wydane: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2022-06-01
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| Seria: | Jin'gangshi yu moliao moju gongcheng |
| Hasła przedmiotowe: | |
| Dostęp online: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2021.0206 |
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