Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects

We present the design, simulation, fabrication and characterization of monolithically integrated high resistivity p-type boron-diffused silicon two-zone heaters in a model high temperature microreactor intended for nanoparticle fabrication. We used a finite element method for simulations of the heat...

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Autors principals:	Milena Rašljić Rafajilović, Katarina Radulović, Milče M. Smiljanić, Žarko Lazić, Zoran Jakšić, Dragomir Stanisavljev, Dana Vasiljević Radović
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2020-08-01
Col·lecció:	Micromachines
Matèries:	high-temperature microreactors nanoparticle synthesis titania titanium dioxide silicon micromachining Pyrex glass micromachining
Accés en línia:	https://www.mdpi.com/2072-666X/11/9/818
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