Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li<sub>3</sub>PO<sub>4</sub> Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge
Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li<sub>3</sub>PO<sub>4</sub> in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode pot...
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| Автори: | , , , , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
MDPI AG
2021-12-01
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| Серія: | Membranes |
| Предмети: | |
| Онлайн доступ: | https://www.mdpi.com/2077-0375/12/1/40 |
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