Influence of Terbium Doping and Annealing on the Structural and Optical Characteristics of Sputtered Zinc Oxide Thin Films

This paper studied the structural and luminescent characteristics of undoped and doped-with-Tb³⁺-ions ZnO films of 200 nm and 600 nm thicknesses, grown via RF magnetron sputtering on (100) silicon substrate in Ar and Ar-O₂ plasma. X-ray diffraction (XRD) patterns revealed a str...

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主要な著者:	Tetyana Kryshtab, Lyudmyla Borkovska, Roberto Benjamín Cortés Herrera, Andriy Kryvko, Oleksandr Kolomys, Sergiy Mamykin, Xavier Portier
フォーマット:	Artigo
言語:	Inglês
出版事項:	MDPI AG 2023-08-01
シリーズ:	Crystals
主題:	ZnO terbium RF magnetron sputtering structure photoluminescence annealing
オンライン･アクセス:	https://www.mdpi.com/2073-4352/13/8/1200
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