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Fabrication and characterization of NbTi microwave superconducting resonators

Superconducting resonators are widely used in fields spanning from quantum computing to electron spin resonance (ESR) spectroscopy. With the goal of realizing superconducting resonators, a broad variety and combination of superconducting materials, substrates and fabrication processes have been used...

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Principais autores: Roberto Russo, André Chatel, Nergiz Şahin Solmaz, Reza Farsi, Hernán Furci, Juergen Brugger, Giovanni Boero
פורמט: Artigo
שפה:Inglês
יצא לאור: Elsevier 2023-06-01
סדרה:Micro and Nano Engineering
נושאים:
Superconducting resonators
NbTi
Microfabrication
Direct photolitography
Ion beam etching
גישה מקוונת:http://www.sciencedirect.com/science/article/pii/S2590007223000333
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