Investigation of Side Wall Roughness Effect on Optical Losses in a Multimode Si₃N₄ Waveguide Formed on a Quartz Substrate

This article presents the results of the study of the influence of the most significant parameters of the side wall roughness of an ultra-thin silicon nitride lightguide layer of multimode integrated optical waveguides with widths of 3 and 8 microns. The choice of the waveguide width was made due to...

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Autores principales:	Anastasia Yakuhina, Alexey Kadochkin, Vyacheslav Svetukhin, Dmitry Gorelov, Sergey Generalov, Vladimir Amelichev
Formato:	Artigo
Lenguaje:	Inglês
Publicado:	MDPI AG 2020-11-01
Colección:	Photonics
Materias:	integrated optics silicon technology silicon nitride photonics reflectometry attenuation
Acceso en línea:	https://www.mdpi.com/2304-6732/7/4/104
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