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Combined Ammonia and Electron Processing of a Carbon-Rich Ruthenium Nanomaterial Fabricated by Electron-Induced Deposition

Ammonia (NH<sub>3</sub>)-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH<sub>3</sub> and electron processing on FEBID deposi...

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Principais autores: Markus Rohdenburg, Johannes E. Fröch, Petra Martinović, Charlene J. Lobo, Petra Swiderek
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2020-08-01
coleção:Micromachines
Assuntos:
focused electron beam-induced deposition
deposit post-processing
ammonia
Ru deposition
carbon nitride
Acesso em linha:https://www.mdpi.com/2072-666X/11/8/769
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