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Microelectromechanical Systems (MEMS) for Biomedical Applications

The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining...

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Bibliografski detalji
Glavni autori: Cristina Chircov, Alexandru Mihai Grumezescu
Format: Artigo
Jezik:Inglês
Izdano: MDPI AG 2022-01-01
Serija:Micromachines
Teme:
Online pristup:https://www.mdpi.com/2072-666X/13/2/164
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