Structural, electrical and hydrogen sensing properties evaluation of fabricated PdO thin films by thermal oxidation

Abstract Palladium oxide (PdO) thin films (~ 60 nm thick) were grown on quartz substrates using a two-step process involving DC magnetron sputtering of Pd films followed by thermal oxidation in dry air at 450–750 °C for 4 h. In this work, a systematic temperature-dependent oxidation strategy is empl...

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Principais autores:	Murat Ozabaci, Esme Isik, Necmettin Kilinc
Format:	Artigo
Jezik:	Inglês
Izdano:	Nature Portfolio 2026-05-01
Serija:	Scientific Reports
Teme:	PdO thin films Sensors Hydrogen detection Thermal oxidation Thickness effect Pd
Online dostop:	https://doi.org/10.1038/s41598-026-49588-8
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