The Pumping Performance of a Multiport Hybrid Molecular Pump and Its Effect on the Inspection Performance of a Helium Mass Spectrometer Leak Detector

The multiport hybrid molecular pump is a new type of molecular pump that was specifically designed for use in helium mass spectrometer leak detectors. This pump enables the instrument to detect both downstream and counter-current leaks. Access to different extraction ports can fulfill various leak d...

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Principais autores:	Bo Li, Xiaodong Wang, Defeng Hou, Dechun Ba
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	MDPI AG 2022-06-01
סדרה:	Applied Sciences
נושאים:	helium mass spectrometer leak detection multiport hybrid molecular pump fine inspection conditions detection sensitivity pumping performance
גישה מקוונת:	https://www.mdpi.com/2076-3417/12/13/6627
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