Si wafers unpredictable inhomogeneities and their crucial role in porous Si fabrication
Abstract Porous Silicon (PSi) is a remarkably versatile material, whose structural reproducibility is highly sensitive to substrate properties and fabrication parameters. This study demonstrates that persistent inconsistencies in PSi fabrication originate not from experimental errors, but from undet...
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| Auteurs principaux: | , , , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Nature Portfolio
2026-04-01
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| Collection: | Scientific Reports |
| Sujets: | |
| Accès en ligne: | https://doi.org/10.1038/s41598-026-48737-3 |
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