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Three-grating monolithic phase-mask for the single-order writing of large-period gratings

An optimized achromatic high-efficiency monolithic phase mask is presented whose principle was demonstrated and described in reference [1]. The mask comprises three submicron period diffraction gratings at a single substrate side that create a purely single spatial frequency interferogram of large p...

詳細記述

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書誌詳細
主要な著者: Bourgin Yannick, Vartiainen Ismo, Jourlin Yves, Kuittinen Markku, Celle Frédéric, Tonchev Svetlen, Parriaux Olivier, Niemi Tapio
フォーマット: Artigo
言語:Inglês
出版事項: EDP Sciences 2011-01-01
シリーズ:Journal of the European Optical Society-Rapid Publications
主題:
オンライン・アクセス:https://jeos.edpsciences.org/articles/jeos/pdf/2011/01/jeos20110611016s.pdf
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