KSEMAW: an open source software for the analysis of spectrophotometric, ellipsometric and photothermal deflection spectroscopy measurements [version 2; peer review: 2 approved]

The optical behavior of devices based on thin films is determined by complex refractive index and thickness of each slab composing the stack; these important parameters are usually evaluated from photometric and/or ellipsometric spectral measurements, given a model of the stack, by means of dedicate...

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Hauptverfasser:	Alberto Mittiga, Marco Montecchi, Francesca Menchini, Claudia Malerba
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	F1000 Research Ltd 2023-01-01
Schriftenreihe:	Open Research Europe
Schlagworte:	thin film optical characterization complex refractive index film thickness spectrophotometric measurements ellipsometric measurements eng
Online-Zugang:	https://open-research-europe.ec.europa.eu/articles/1-95/v2
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