Dual-function pressure-temperature sensor based on silicon whiskers
The article presents the design of a pressure-temperature sensor based on p-type silicon whiskers, doped with boron, with a resistivity of 0,005 Ohm?cm. The sensor is operable in a temperature range from –100 to +200°C and at pressures from 0 to 20 MPa. The sensor is designed for a wide range of app...
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| Hoofdauteurs: | , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Politekhperiodika
2013-06-01
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| Reeks: | Технологія та конструювання в електронній апаратурі |
| Onderwerpen: | |
| Online toegang: | https://tkea.com.ua/index.php/journal/article/view/363 |
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