Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
We present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Wiley
2020-01-01
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| coleção: | International Journal of Photoenergy |
| Acesso em linha: | http://dx.doi.org/10.1155/2020/6686797 |
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