Design Guidelines for Thermally Driven Micropumps of Different Architectures Based on Target Applications via Kinetic Modeling and Simulations

The manufacturing process and architecture of three Knudsen type micropumps are discussed and the associated flow performance characteristics are investigated. The proposed fabrication process, based on the deposition of successive dry film photoresist layers with low thermal conductivity, is easy t...

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Principais autores:	Guillermo López Quesada, Giorgos Tatsios, Dimitris Valougeorgis, Marcos Rojas-Cárdenas, Lucien Baldas, Christine Barrot, Stéphane Colin
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2019-04-01
Serija:	Micromachines
Teme:	Knudsen pump thermal transpiration vacuum micropump rarefied gas flow kinetic theory microfabrication photolithography microfluidics
Online dostop:	https://www.mdpi.com/2072-666X/10/4/249
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