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Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography

Metal oxide semiconductor (MOS) gas sensors are widely used for gas detection. Typically, the hotplate element is the key component in MOS gas sensors which provide a proper and tunable operation temperature. However, the low power efficiency of the standard hotplates greatly limits the portable app...

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Main Authors: Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Mario Barozzi, Andrea Gaiardo, Vincenzo Guidi
Format: Artigo
Language:Inglês
Published: MDPI AG 2023-11-01
Series:Micromachines
Subjects:
gas sensors
nano heaters
electron beam lithography
focused ion beam
ion beam lithography
power consumption
Online Access:https://www.mdpi.com/2072-666X/14/11/2060
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