Research on electrostatically driven MEMS optical phase shifter with integrated comb capacitive displacement sensor
We designed and fabricated an electrostatically actuated micro-electro-mechanical system (MEMS) optical phase shifter incorporating a comb capacitive displacement sensor. To overcome the technical challenges of high driving voltage and inadequate control precision in current MEMS optical phase shift...
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| Главные авторы: | , , , , , |
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| Формат: | Artigo |
| Язык: | Chinês |
| Опубликовано: |
Shanghai Institute of Microsystem and Information Technology
2025-08-01
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| Серии: | Gongneng cailiao yu qijian xuebao |
| Предметы: | |
| Online-ссылка: | https://www.jfmd.net.cn/article/doi/10.20027/j.gncq.2025.0030 |
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