Morphology and Corrosion Behavior Study of Thin TiN Films Deposited at Different Substrates by DC Magnetron Sputtering
<p>TiN thin films have been deposited by magnetron sputtering (DC) method under pure argon (100% Ar) gas for different times at 100 <sup>o</sup>C temperature. Additionally, three substrate types have been used: Low Carbon Steel (LCS), Stainless Steel (SS304) and Silicon of (100) orientation. The com...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Universidade Federal de Mato Grosso do Sul
2021-03-01
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| Serier: | Orbital: The Electronic Journal of Chemistry |
| Fag: | |
| Online adgang: | http://orbital.ufms.br/index.php/Chemistry/article/view/1577 |
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