A Comparative Investigation of Mechanical Properties of TiB<sub>2</sub>/Cr Multilayer Film by Indentation
Alternating TiB<sub>2</sub>-dcMS and Cr-HiPIMS layers are used to fabricate TiB<sub>2</sub>/Cr multilayer films. Introducing a 5-nm-thick Cr interlayer deposited under a substrate bias of −60 V produces slight increases in both film hardness and elastic modulus. The TEM observation indicates that th...
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI AG
2022-11-01
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| Schriftenreihe: | Magnetochemistry |
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| Online-Zugang: | https://www.mdpi.com/2312-7481/8/11/148 |
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