Modeling of Masked Droplet Deposition for Site-Controlled Ga Droplets

Site-controlled Ga droplets on AlGaAs substrates are fabricated using area-selective deposition of Ga through apertures in a mask during molecular beam epitaxy (MBE). The Ga droplets can be crystallized into GaAs quantum dots using a crystallization step under As flux. In order to model the complex...

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Bibliografski detalji

Glavni autori:	Stefan Feddersen, Viktoryia Zolatanosha, Ahmed Alshaikh, Dirk Reuter, Christian Heyn
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2023-01-01
Serija:	Nanomaterials
Teme:	quantum dots site control masked deposition area-selective deposition droplet density droplet epitaxy
Online pristup:	https://www.mdpi.com/2079-4991/13/3/466
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