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Analytical Gas‐Sensing Responses for Single‐Crystalline Semiconducting Gas Sensors

Abstract In this study, an analytical gas response formula is developed based on the classical gaseous molecule adsorption model. To validate the analytical formula, an array of silicon nanowires or microwires is fabricated by patterning the device layer of a silicon‐on‐insulator (SOI) wafer. Gas Ha...

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Sonraí bibleagrafaíochta
Príomhchruthaitheoirí: Huan Liu, Zehuan Li, Kai Li, Yaping Dan
Formáid: Artigo
Teanga:Inglês
Foilsithe / Cruthaithe: Wiley-VCH 2023-12-01
Sraith:Advanced Sensor Research
Ábhair:
Rochtain ar líne:https://doi.org/10.1002/adsr.202300071
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