In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 &#21...

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Detalhes bibliográficos

Principais autores:	Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2020-01-01
coleção:	Sensors
Assuntos:	mems piezoresistive cantilever sensors dynamic mode carbon nanoparticle particle mass measurement
Acesso em linha:	https://www.mdpi.com/1424-8220/20/3/618
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