Improvement of textured AlCu with Ta underlayer on LiNbO3 substrate
Improving the lifetime of surface acoustic wave filters requires reduction of electromigration effects. We report on the growth mechanism of AlCu2% films deposited by the e-beam physical vapor deposition technique. The state of the art shows that the introduction of an underlayer that alters the sur...
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| Principais autores: | , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
AIP Publishing LLC
2022-10-01
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| Serier: | AIP Advances |
| Online adgang: | http://dx.doi.org/10.1063/5.0107058 |
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