Preparation of highly preferred （110） optical-grade diamond films under CO2 atmosphere

Diamond films prepared by conventional microwave plasma chemical vapor deposition （MPCVD） often face issues such as low growth rates，disordered grain orientations，and non-diamond phase defects，which limit further enhancement of their optical properties. This study introduces CO₂ as an auxiliary gas...

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Principais autores:	YANG Ao, LIU Yuchen, GUO Zhijian, CHEN Liangxian, LIU Jinlong, WEI Junjun, LI Chengming
Formato:	Artigo
Idioma:	Chinês
Publicado em:	Journal of Materials Engineering 2026-02-01
coleção:	Cailiao gongcheng
Assuntos:	diamond mpcvd （110） preferred orientation co2 auxiliary
Acesso em linha:	https://jme.biam.ac.cn/CN/10.11868/j.issn.1001-4381.2025.000133
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