Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target
In this study, Copper Indium Gallium Selenide (CIGS) thin films were successfully sputtered from a single quaternary target onto soda lime glass substrates. The effect of the incident angle of target atoms and sputter temperature on the properties of the films were examined using various techniques....
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| Auteurs principaux: | , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Sivas Cumhuriyet Üniversitesi
2023-06-01
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| Collection: | Cumhuriyet Science Journal |
| Sujets: | |
| Accès en ligne: | https://dergipark.org.tr/en/download/article-file/2918763 |
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