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Gas sensing capability of spray deposited Al-doped ZnO thin films; pp. 124–130

Aluminium-doped zinc oxide thin films were deposited from zinc acetylacetonate and aluminium acetylacetonate at various aluminium concentrations and deposition temperatures by ultrasonic spray pyrolysis. The structural and morphological properties and elemental composition of these films were studie...

Ausführliche Beschreibung

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Bibliografische Detailangaben
Hauptverfasser: Jako S. Eensalu, Atanas Katerski, Arvo Mere, Malle Krunks
Format: Artigo
Sprache:Inglês
Veröffentlicht: Estonian Academy Publishers 2018-03-01
Schriftenreihe:Proceedings of the Estonian Academy of Sciences
Schlagworte:
Online-Zugang:https://kirj.ee/public/proceedings_pdf/2018/issue_2/proc-2018-1-124-130.pdf
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