Gas sensing capability of spray deposited Al-doped ZnO thin films; pp. 124–130
Aluminium-doped zinc oxide thin films were deposited from zinc acetylacetonate and aluminium acetylacetonate at various aluminium concentrations and deposition temperatures by ultrasonic spray pyrolysis. The structural and morphological properties and elemental composition of these films were studie...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Estonian Academy Publishers
2018-03-01
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| Schriftenreihe: | Proceedings of the Estonian Academy of Sciences |
| Schlagworte: | |
| Online-Zugang: | https://kirj.ee/public/proceedings_pdf/2018/issue_2/proc-2018-1-124-130.pdf |
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