ANALYSIS OF LOW VACUUM MICROWAVE DISCHARGE EXCITING CONDITIONS IN RESONATOR TYPE PLASMATRON
The efficiency of a cavity microwave resonator using for getting large volume (more than 4000 cm3) low vacuum plasma for group treatment of products in the microelectronics technology has been evaluated. The results showed that the value of electric field breakdown intensity about E0 ≈ 110 V/cm in a...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Russo |
| Publicado: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Доклады Белорусского государственного университета информатики и радиоэлектроники |
| Assuntos: | |
| Acceso en liña: | https://doklady.bsuir.by/jour/article/view/592 |
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