Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-ray Transparent Samples
We employ xenon (Xe) plasma focused ion beam (PFIB) milling to obtain soft X-ray transparent windows out of bulk samples. The use of a Xe PFIB allows for the milling of thin windows (several 100 nm thick) with areas of the order of 100 µm × 100 µm into bulk substrates. In addition, we present an app...
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| Hlavní autoři: | , , , , , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI AG
2021-05-01
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| Edice: | Crystals |
| Témata: | |
| On-line přístup: | https://www.mdpi.com/2073-4352/11/5/546 |
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