Optical Monitoring of the Production Quality of Si-Nanoribbon Chips Intended for the Detection of ASD-Associated Oligonucleotides

Gas-phase etching and optical lithography were employed for the fabrication of a silicon nanoribbon chip (Si-NR chip). The quality of the so-fabricated silicon nanoribbons (Si-NRs) was monitored by optical Raman scattering spectroscopy. It was demonstrated that the structures of the Si-NRs were virt...

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Prif Awduron:	Kristina A. Malsagova, Tatyana O. Pleshakova, Vladimir P. Popov, Igor N. Kupriyanov, Rafael A. Galiullin, Andrey F. Kozlov, Ivan D. Shumov, Anna L. Kaysheva, Fedor V. Tikhonenko, Alexander I. Archakov, Yuri D. Ivanov
Fformat:	Artigo
Iaith:	Inglês
Cyhoeddwyd:	MDPI AG 2021-02-01
Cyfres:	Micromachines
Pynciau:	autism spectrum disorders microRNA silicon nanoribbon sensor chip DNA oligonucleotides Raman spectroscopy
Mynediad Ar-lein:	https://www.mdpi.com/2072-666X/12/2/147
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!