Research On the Load‐Bearing Characteristics of Porous Air Bearings Applied to Ultra‐Precision Spindles
ABSTRACT Existing research primarily focuses on small‐to‐medium‐scale porous air bearings, with limited attention given to the large‐scale bearings required for ultra‐precision equipment, such as wafer thinning machines. This study investigates the load‐bearing characteristics of large‐scale porous...
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| Hauptverfasser: | , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Wiley
2026-06-01
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| Schriftenreihe: | Engineering Reports |
| Schlagworte: | |
| Online-Zugang: | https://doi.org/10.1002/eng2.70863 |
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