Ultrathin Flexible Encapsulation Materials Based on Al₂O₃/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors

Ultrathin flexible encapsulation (UFE) using multilayered films has prospects for practical applications, such as implantable and wearable electronics. However, existing investigations of the effect of mechanical bending strains on electrical properties after the encapsulation procedure provide insu...

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Principais autores:	Zhuofan Wang, Hongliang Lu, Yuming Zhang, Chen Liu, Haonan Zhang, Yanhao Yu
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2023-12-01
Serija:	Micromachines
Teme:	ultrathin flexible encapsulation Al<sub>2</sub>O<sub>3</sub>/alucone silicon nanomembrane metal-oxide-semiconductor capacitors electrical stability
Online dostop:	https://www.mdpi.com/2072-666X/15/1/41
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