Bifurcation analysis of torsional micromirror actuated by electrostatic forces
In this paper, static and dynamic behavior of an electrostatically actuated torsional micro-actuator is studied. The microactuator is composed of a micromirror and two torsional beams, which are excited with two electrodes. Unlike in the traditional microactuators, the electrostatic force is exerted...
Guardado en:
| Autores principales: | , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Institute of Fundamental Technological Research Polish Academy of Sciences
2014-03-01
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| Colección: | Archives of Mechanics |
| Materias: | |
| Acceso en línea: | https://am.ippt.pan.pl/index.php/am/article/view/1191 |
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