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Pre-Deformation-Assisted Cryogenic Micromachining for Fabrication of Three-dimensional Unique Micro Channels

Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In thi...

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Hlavní autoři: Koji MISHIMA, Yasuhiro KAKINUMA, Tojiro AOYAMA
Médium: Artigo
Jazyk:Inglês
Vydáno: The Japan Society of Mechanical Engineers 2010-08-01
Edice:Journal of Advanced Mechanical Design, Systems, and Manufacturing
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On-line přístup:https://www.jstage.jst.go.jp/article/jamdsm/4/5/4_5_936/_pdf/-char/en
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