Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

Imaging buried interfaces is necessary to assess the quality of electronic devices and their degradation mechanisms. Here, Hirohata et al. use energy-filtered scanning electron microscopy to image buried defects in an inorganic lateral spin-valve device, at the nanometre scale and non-destructively.

Bibliografische Detailangaben

Hauptverfasser:	Atsufumi Hirohata, Yasuaki Yamamoto, Benedict A. Murphy, Andrew J. Vick
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	Nature Portfolio 2016-09-01
Schriftenreihe:	Nature Communications
Online-Zugang:	https://doi.org/10.1038/ncomms12701
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